Measurement Technology for Micro-Nanometer Devices

Bok av Jingdong Chen och Zongmin Ma m.fl.
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale Highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories Focuses on the measurement techniques for characterizing MEMS/NEMS devices