Semiconductor micromachining

A two-volume comprehensive guide to both the fundamental physics and chemistry of semiconductor processing, this text covers a broad range of topics ranging from chemical processes through to the microstructuring of semiconductors. The objective is to demonstrate the feasibility of structuring semiconductors for device technology and bridges fundamental research and marketed saleable devices, such as TVs and microwaves. Volume one concerns fundamental electrochemistry and physics and Volume two concerns techniques and industrial applications.