3D IC Integration and Packaging
Bok av John H Lau
A comprehensive guide to 3D IC integration and packaging technology 3D IC Integration and Packaging fully explains the latest microelectronics techniques for increasing chip density and maximizing performance while reducing power consumption. Based on a course developed by its author, this practical guide offers real-world problem-solving methods and teaches the trade-offs inherent in making system-level decisions. Explore key enabling technologies such as TSV, thin-wafer strength measurement and handling, microsolder bumping, redistribution layers, interposers, wafer-to-wafer bonding, chip-to-wafer bonding, 3D IC and MEMS, LED, and complementary metal-oxide semiconductor image sensors integration. Assembly, thermal management, and reliability are covered in complete detail. 3D IC Integration and Packaging covers: 3D integration for semiconductor IC packaging Through-silicon vias modeling and testing Stress sensors for thin-wafer handling and strength measurement Package substrate technologies Microbump fabrication, assembly, and reliability 3D Si integration 2.5D/3D IC integration 3D IC integration with passive interposer Thermal management of 2.5D/3D IC integration Embedded 3D hybrid integration 3D LED and IC integration 3D MEMS and IC integration 3D CMOS image sensors and IC integration PoP, chip-to-chip interconnects, and embedded fan-out WLP