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Ion Implantation Technology : 18th International Conference on Ion Implantation Technology IIT 2010

Bok av Jiro (EDT) Matsuo Masataka (EDT) Kase Takaaki (EDT) Aoki
The proceedings of 18th International conference on Ion Implantation Technology (IIT2010) covers all aspect of ion implantation, from the fundamentals of ion-solid interactions to industrial applications of the latest implantation machines and device manufacturing.