Integral'nye Mikromekhanicheskie Zerkala

Rassmotreny printsipy postroeniya mikromekhanicheskikh zerkal i ustroystv obrabotki signalov emkostnykh preobrazovateley peremeshcheniy. Predstavleny razrabotannye metody postroeniya mikromekhanicheskikh zerkal s krestoobraznym i integrirovannym vnutrennimi podvesami, uravneniya dvizheniya zerkal'nykh elementov i modeli dlya rascheta zhestkostey uprugikh podvesov predlozhennykh ustroystv. Predlozhen metod proektirovaniya mikromekhanicheskikh zerkal.